Equipment Services

FIELD SERVICE ENGINEERING

DSI maintains a dedicated team of experienced Field Service Engineers (FSE) located in all of the strategic locations for Semiconductor Manufacturing. Through our internally developed, ongoing training program, our engineers retain the cutting edge of knowledge required to best serve our customers.

EQUIPMENT REFURBISHING

DSI offers complete refurbishing for the most sophisticated metrology tools in the wafer manufacturing fab. Our specially trained and highly skilled engineers and technicians will thoroughly verify all aspects of the tools and restore them to meet the most demanding requirements. DSI has supplied refurbished tools to major customers around the world, with continued satisfaction.

The principal tools DSI specializes in are:
Bright Field: KLA 2132, 2135, 2138, 2139, 2350, 2365…
Dark Field: KLA AIT I, KLA AIT II…
SurfScan: KLA 6220, 6420, SP1, SP1 Tbi…
4 Point Probe: KLA RS 55, RS 75, RS 100…
Profilers P Series…
HRP 220 HRP 240 HRP 340

Other OEMs supported include Vistec, Hitachi, Thermawave, and Applied Materials (AMAT)
Contact us at any of our locations for FSE support in:
Equipment Start-up
Troubleshooting
Onsite Maintenance
Applications

DSI supports all metrology platforms with our team of dedicated FSEs. Through our partnering network we also support other process areas such as Ion Implant and Diffusion.